Spin Dryer

Spin Dryer

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  • Spin Dryer

    This machine is a spin dryer for wafers, etc. It is a spin dryer that stores wafers of 300 mm or less in cassettes,
    manually loads 2 cassettes or 4 cassettes vertically, and performs spin drying.

    Spin Dryer

    Specification

    Model SPD400・500・600・800・1200
    4 Carrier Type (2 carrier type is also available)
    However, 8 inch and 12 inch are 2 carrier type
    Rotation Speed Draining 0~1200 rpm (variable)
    Normally 400~600 rpm (variable)
    Drying 0~1200 rpm (variable)
    Normally 700~1000 rpm (variable)
    Processing Time Draining 0~999.9sec (variable)
    Drying 0~999.9sec (variable)
    ULPA Filter 0.1um, repair rate above 99.9995%
    Lid Automatic opening and shutting by air cylinder
    Exhaust Automatic damper is equipped, 1 at the back of device
    Shaft Sealant Special seal
    Power Supply 3φ AC200V 6KVA 50 / 60Hz
  • Desktop Spin Dryer

    This machine is a desktop spin dryer. In particular, it is a desktop spin dryer that stores a board of 150 mm □ or less in a cassette,
    manually loads 2 cassettes or 4 cassettes vertically, and performs spin drying.

    Desktop Spin Dryer

    Features

    • HEPA or ULPA filter is built inside the lid, and clean air is introduced in order to improve the cleanliness inside the chamber.
    • It is easy to carry since it is a desktop type and light weighted.
    • Both the main body and the chamber are made of PVC and will not rust.

    Specification

    Model SPD400・500・600・800・1200
    4 Carrier Type (2 carrier type is also possible)
    However, 8 inch and 12 inch are 2 carrier type
    Rotation Speed Draining 0-1200 rpm (variable)
    Normal 400-600 rpm (variable)
    Drying 0-1200 rpm (variable)
    Normal700-1000 rpm (variable)
    Processing Time Draining 0-999.9sec (variable)
    Drying 0-999.9sec (variable)
    ULPA Filter 0.1um, repair rate over 99.9995%
    Lid Automatic opening and closing by air cylinder
    Exhaust Comes with auto damper, one place in the back
    Shaft Sealant Special sealant
    Power Supply 3φAC200V 6KVA 50/60Hz
  • Desktop Spin Dryer (SF Type)

    Desktop Spin Dryer (SF Type)

    Features

    • Widely used for desktop drying and processing small amount of silicon or compound semiconductor wafers.
    • The operation is extremely easy. After setting the wafer on the turntable, lower the top lid and press the start button for a safe spin dry finish.

    Specification

    Model SF-300 type spinner SF-600 type spinner
    Wafer Size 3 inches~5 inches 4 inches~8 inches (6 sheets processed by 6 inch)
    Turntable Diameter 300m/m made of PVC Diameter 600m/m made of PVC
    Rotation Speed Drying rotation 0 to 2000 rpm (variable) Drying rotation 0 to 1800 rpm (variable)
    Drying N2 blow (vary from 0~2000 rpm) N2 blow (vary from 0~2000 rpm)
    Outer Dimension 450Wx500Dx450H Made of PVC 650Wx650Dx500H Made of PVC
    Power Supply AC 100V 4A AC 100V 6A