• CO2 Spray Cleaning System

    CO2 Spray Cleaning System

    Features

    • Our original nozzle: CO2 Laval jet nozzle
      It can change solid CO2 particle velocity and particle density, and suggest the optimum cleaning conditions
    • CO2 Cleaning in vacuum or in low dew point is possible
    • No-damage dry cleaning is possible
    • Substrate size is φ12 inch maximum
    • Handy type spray unit is available for sale

    Applications

    • Compound Semiconductor
      Fence removal after metal lift-off process
    • SAW Device
      Remove etching residue (vacuum type CO2 cleaning)
    • CCD Sensor
      Remove particle on microlens
    • MEMS
      Remove sputtering residue, improve wettability