Spinner

Spin Cleaning Device (Single Wafer)

ウエハー洗浄機、エッチング装置、スピンドライヤー等、半導体製造装置を主としたメーカーです。
お客様のニーズに合わせて、研究用の小型機から量産用の自動装置を小回りのきく企業として製造いたします。
また、これらの技術を生かしLCD.PDP.有機EL.FED.LED等の洗浄装置も開発製造いたしております。
全ての商品を自社にて製造いたしておりますので、安価にて御提供することが出来ます。
他社製品でのメンテナンスでお困りの場合でも対応できますので、お気軽にお声がけください。

  • Automatic Developing Device

    A single-wafer developing device sprays the developer kept at a constant temperature evenly to perform high-precision development processing.

    Automatic Developing Device

    Specification

    Automatic Developing Device ~φ300m / m
    HEPA or ULPA Optional
    Function Developing temperature control/ spray/ paddle
    Others Hot plate/ cool plate/ rinse/ dry
    Rotation Speed Standard 3000rpm maximum
    IN/OUT Cassette to cassette/ Foup and more
    Conveyor Articulated robot
    Holding method=Edge clamp/ electrostatic/ Bernoulli etc.
  • Automatic Resist Coating Device

    Uniform resist coating is performed using our unique coating technology.
    Application under reduced pressure is also possible as an option.

    Automatic Resist Coating Device

    Specification

    Wafer Size ~φ300m/m
    HEPA or ULPA Optional
    Function Dispenser/ force feeding tank/ cup cleaning
    Baking Hot plate/ vacuum chamber
    Number of Rotations Standard 5000rpm maximum
    IN/OUT Cassette to cassette / Foup and more
    Conveyor Articulated robot
    Holding method = edge clamp/ electrostatic/ Bernoulli and more
  • Spray Developing Device

    This machine is a spin-type spray developer that develops, rinses, rinses, and dries automatically and manually.
    You can process several workpieces at once.

    Spray Developing Device

    Specification

    Wafer Size ~φ300m/m
    HEPA or ULPA Optional
    Function Developing liquid temperature control/ spray/ paddle
    Others Rinse/ dry
    Rotation Speed Standard 3000rpm maximum
    IN/OUT Manual
    Number of processing sheets Negotiable
  • Desktop Manual Spin Coater

    This machine is desk type of manual spin coater for 300mm substrate.
    As for the condition setting coming by application as for each processing mode performing in touch panel on the operation panel each mode is displayed on touch panel.

    Desktop Manual Spin Coater

    Specification

    External Dimensions W420×D500×H335
    Motor 600W AC Servo Motor 200V
    15A transformer for 100V (optional)
    Number of Rotations 0 to 3000rpm (5000rpm maximum is optional)
    Number of Rotations Display Digital display
    Rotation Accuracy ±1rpm
    Number of Programs 10 programs 50 steps
    Sample Stand Vacuum suction -50Kpa (vacuum pump is optional)
    Inner Cup Φ270 aluminum scraping, surface treatment
    Outer Cup SUS304 φ360 drawing