• Low stress, high hardness and high insulation by dual frequency
• Superior film thickness uniformity and reproducibility
• Reduction of metal contamination by special surface treatment
• Significant particle reduction and improved productivity with radical plasma cleaning system
• Controls wide range of film characteristic
• Plenty of accumulated data
• Applicable for tray transportation

• Substrate heating source can be selected from water cooled type and heated type
• Ion source can be selected from RF plasma CVD method and ionized deposition method
• Substrate stage can be selected from water cooled type and heated type
• Superior film thickness uniformity and reproducibility
• Processable for various substrate materials
• Controls wide range of film characteristic
• Plenty of accumulated data
• Applicable for tray transportation

• Fully automated process
• Substrate plasma cleaning system
• Superior substrate temperature uniformity and gas flow method
• Superior film thickness uniformity and reproducibility
• Plenty of accumulated data

• Chamber volume 1m3
• Original plasma control method
• Multistage mass processing
• Simple structure with high versatility
• Processable for various product materials
• Controls wide range of film characteristic
• Plenty of accumulated data

Widely used for Diamond-Like Carbon (DLC) coating inside a plastic (Polyethylene Terephthate) bottle by our highly skilled plasma CVD technologies.
By applying a submicron order of DLC thin film coating to an inner surface of plastic bottles, it prevents flavor degradation due to oxidation and elution of carbonic acid components.
It also lowers distribution costs by reducing the weight of the bottle.