• Load-lock Type EB Vapor Deposition System

    Load-lock Type EB Vapor Deposition System

    Features

    • Our original heating mechanism of rapid temperature-raising/lowering for a substrate temperature 900℃.
    • Superior film thickness uniformity and reproducibility
    • High vacuum process is possible by load lock type
    • Particle reduction with optimal surface treatment
    • Easy chamber maintenance
    • Low temperature process such as liftoff ,etc. is also available

    Applications

    • LED
    • Electronic components
    • Optical components
    • MEMS
    • Power device

    Specification

    Substrate Size φ12 inch maximum
    Substrate Heating Temperature 700 ° C (substrate surface)
    Evaporation Material Metal or oxide
    Vacuum Exhaust CP+DP
    Film Thickness Control Crystal type
    Control Operation Control: PLC
    Operation: Touch panel or PC
    Data Logging External memory or PC
    Substrate Transfer Vacuum transfer robot
    Option Substrate heating 900 ° C (substrate surface)
    Substrate cooling
    Substrate bias
    Substrate rotation
    Reactive gas supply unit and more
  • Vapor Deposition System For OLED

    Vapor Deposition System For OLED

    Overview

    Multi chamber type for device and material development.
    The system processes pretreatment, film deposition and film sealing without making it contact with atmosphere.
    Plasma cleaning chamber, organic vapor deposition chamber, electrode vapor deposition chamber, sealing chamber and others can be selected according to your purpose.

    Features

    • Available up to 300mm square substrate.
    • Deposition cells can be selected from various materials and sizes
    • CVD chamber, sputtering chamber and others can be selected.

    Applications

    • OLED Display
    • OLED Lighting
  • EB Vapor deposition Ion Beam Sputtering Composite System

    EB Vapor deposition Ion Beam Sputtering Composite System
  • Lubrication Deposition System for Research and Development

    Lubrication Deposition System for Research and Development
  • High Vacuum Ultra High Temperature EB Deposition System

    High Vacuum Ultra High Temperature EB Deposition System
  • Ag Evaporation Source For OLED

    Ag Evaporation Source For OLED