• CO2 Spray Cleaning Device

    CO2 Spray Cleaning Device


    • Our original nozzle: CO2 rubber jet nozzle is used
      It can change solid CO2 particle velocity and particle density, and suggest the optimum cleaning conditions
    • Cleaning in a vacuum environment
      CO2 cleaning in a low dew point environment is possible
    • No-damage dry cleaning is possible
    • Board size is φ12 inch maximum
    • Handy type spray unit is available for sale


    • Compound Semiconductor
      Fence removal after metal lift-off process
    • SAW Device
      Remove etching residue (vacuum type CO2 cleaning)
    • CCD Sensor
      Remove particle on microlens
    • MEMS
      Remove spatter residue, improve wettability